Mems Devices May Be Anything Between a Few Micrometres and Millimetres In Size. Mems
Have Excellent Potential For Efficiently Sensing Physical, Chemical, and Biological Factors, Which Might Be
Combined With Vlsi Processors. Mems Make Use of the Mechanical Characteristics of a Variety Of
Components, Including Reservoirs, Channels, Cantilevers, Beams, Comb Drives, Membranes, And
Reservoirs. the Mechanical Behaviour of These Micromechanical Devices In the Presence of Factors Has
To Be Thoroughly Studied In Order to Make the Most Use of Their Characteristics.